Caspian Oil & Gas Incorp. Refining & Petrochemicals 2025Products & Services Spectropur - equipment for semiconductor gases

Spectropur - equipment for semiconductor gases

Exhibitor
Spectron Gas Control Systems GmbH

The product range is specially adapted to applications in the semi conductor industry and ranges from components like pressure regulators and valves up to complete panels, VMP’s, VMB’s and gas cabinets. Spectropur products are made from remelted stainless steel with electro-polished surfaces. The pressure regulators and valves are built with Hastelloy diaphragms. The dead space optimised components are sealed metal to metal using the VCR technology. Patented purging devices secure the required gas purity.

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